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为了精确地描述激光外差干涉在高加速度超精密测量中加速度对位移测量精度的影响机理与规律,建立了高加速度超精密激光外差干涉位移测量模型。通过分析测量棱镜三维运动对多普勒频移的影响,推导出高加速度激光外差干涉位移测量模型。理论分析和仿真实验表明,当测量加速度为9m/s2,匀加速运行的位移为500mm时,由于加速度变化引起的相对论性效应对测量精度的影响为5nm。高加速度超精密激光外差干涉位移测量模型的建立,可提高激光外差干涉在高加速度超精密测量中的测量精度,为激光外差干涉在高速和超高速测量领域的应用提供了理论依据。
In order to accurately describe the mechanism and rule of the influence of acceleration on displacement measurement accuracy in high-acceleration ultra-precision measurement, a model of high-precision laser heterodyne interference displacement measurement is established. By analyzing the influence of three-dimensional prism movement on Doppler frequency shift, a model of high-acceleration laser heterodyne interference displacement measurement is deduced. Theoretical analysis and simulation results show that when the acceleration of measurement is 9m / s2 and the displacement of uniform acceleration is 500mm, the influence of the relativistic effect caused by the acceleration on the measurement accuracy is 5nm. The establishment of high-acceleration super-precision laser heterodyne interferometric displacement measurement model can improve the measurement accuracy of laser heterodyne interference in high-acceleration ultra-precision measurement and provide a theoretical basis for the application of laser heterodyne interference in the field of high-speed and ultra-high-speed measurement.