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本文利用高真空离子束辅助沉积系统(IBAD)在室温下制备了ZrB2、WNx和一系列ZrB2/WNx纳米多层膜,利用XRD、SEM、XP-2台阶仪、纳米力学测试系统表征了薄膜的微结构和机械性能,分析了调制周期对薄膜结构与机械性能的影响。结果表明:ZrB2具有典型的六角相及WNx为六方与立方混合相结构,ZrB2/WNx的多层膜则呈现多晶结构。所有多层膜的纳米硬度与弹性模量值都高于两种个体单层膜材料值。当调制周期Λ=9.6 nm,轰击能量为200 eV时,ZrB2/WNx的多层膜显示出最高的硬度(30.2 GPa)和弹性模量,内应力和划痕测试等机械性能也取得较好的结果。
In this paper, ZrB2, WNx and a series of ZrB2 / WNx multilayers were prepared at room temperature using high vacuum ion beam assisted deposition system (IBAD). The films were characterized by XRD, SEM, XP- The microstructure and mechanical properties were analyzed. The influence of the modulation period on the structure and mechanical properties of the films was analyzed. The results show that ZrB2 has a typical hexagonal and WNx mixed phases with hexagonal and cubic phases, while ZrB2 / WNx multilayers exhibit polycrystalline structures. The nano-hardness and elastic modulus values of all multilayer films are higher than those of two individual monolayer films. When the modulation period is Λ = 9.6 nm and the bombardment energy is 200 eV, the multilayer films of ZrB2 / WNx show the highest hardness (30.2 GPa) and elastic modulus, and the mechanical properties such as internal stress and scratch test are also better result.