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本文叙述高分子薄膜电容式湿敏元件的研制意义,测湿原理、湿敏元件的构造,感温材料的感湿机理、湿敏元件的性能。性能包括感湿特性,响应特性,温度特性,频率特性,耐湿耐水性,长期稳定性等。湿滞回差小,线性好,响应时间短,温度系数小,稳定性好是所研制的湿敏元件的突出特点。电容式湿敏元件是非常有前途的一类湿敏元件。
This paper describes the research and development significance of the polymer film capacitive humidity sensor, the principle of moisture measurement, the structure of the humidity sensor, the humidity sensing mechanism of the temperature sensitive material and the performance of the humidity sensor. Properties include moisture sensitivities, response characteristics, temperature characteristics, frequency characteristics, moisture and water resistance, long-term stability and so on. Wet hysteresis difference is small, linear, response time is short, the temperature coefficient is small, good stability is developed by the salient features of the humidity sensor. Capacitive humidity sensor is a very promising type of humidity sensor.