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报道了液氮温度下He+离子注入LiNbO3波导的制备,采用棱镜耦合法测量了波导退火前后各导模的有效折射率,计算了波导层折射率的分布和晶体中He+离子的射程分布和损伤分布,两者吻合得较好。
The preparation of He + ion implanted LiNbO3 waveguide at liquid nitrogen temperature was reported. The effective refractive index of each guided mode before and after the waveguide annealing was measured by prism coupling method. The refractive index distribution of the waveguide layer and the range distribution and damage distribution of He + ions in the crystal were calculated , Both agree better.