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采用一种设备简单、原料低廉的新型方法,在镀有ZnO先驱薄膜的(0001)蓝宝石上利用水热法制备出了柱状ZnO阵列薄膜.用扫描电镜(SEM),X射线衍射(XRD)对样品的形貌和结构进行了表征,结果显示ZnO薄膜为柱状阵列,基于蓝宝石衬底沿c轴择优生长,且(0004)摇摆曲线半高宽度(FWHM)约为1·8°.此ZnO阵列薄膜具有很强的紫外发射光谱(PL).
A novel ZnO thin film ZnO (0001) sapphire was prepared by hydrothermal method with a simple and inexpensive raw material. The morphology of the ZnO thin films was characterized by scanning electron microscopy (SEM), X-ray diffraction The morphology and structure of the ZnO thin films were characterized. The results show that the ZnO thin films are columnar based on the c-axis growth of the sapphire substrate, and the full width at half maximum (FWHM) of the (0004) rocking curve is about 1.8. The film has a strong UV emission spectrum (PL).