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综述了ITO薄膜的半导化机理、应用和制备工艺。ITO薄膜的半导化机制是高价Sn~(4+)替代部分In~(3+)和氧缺位。ITO薄膜主要用于光电器件中,例如用于液晶显示。综述了磁控溅射、CVD、喷雾热分解和溶胶-凝胶四种制膜工艺。
The semiconducting mechanism, application and preparation of ITO thin films are reviewed. The semiconducting mechanism of ITO thin film is the replacement of In ~ (3 +) and oxygen vacancies in high-valent Sn ~ (4+). ITO thin films are mainly used in optoelectronic devices, for example for liquid crystal displays. Magnetron Sputtering, CVD, spray pyrolysis and sol-gel four kinds of film forming process are reviewed.