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A novel broadband transmission method to determine polymer film thickness during manufacturing is proposed, and a measurement system is developed based on this method. The relationship between broadband optical power and film thickness is deduced according to the Lambert-Beer law. The system is composed of a halogen light and an optical power meter. Results show that the measurement error of this method is approximately 1 μm, and the resolution of the system is below 0.4 μm for polymer films with less than 100-μm thickness.
A novel broadband transmission method to determine polymer film thickness during manufacturing is proposed, and a measurement system is developed based on this method. The relationship between broadband optical power and film thickness is deducted according to the Lambert-Beer law. The system is composed of a show the measurement error of this method is approximately 1 μm, and the resolution of the system is below 0.4 μm for polymer films with less than 100-μm thickness.