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采用超声喷雾热分解技术(USP),以二水醋酸锌(Zn(CH3COO)2.2H2O)为原材料,在无碱玻璃衬底上制备了ZnO薄膜。对前驱液pH值、ZnO薄膜结构特性、表面形貌、电学和光学特性的研究结果表明,冰乙酸对ZnO薄膜生长速率具有重要影响。X射线衍射(XRD)和扫描电子显微镜(SEM)测试显示,所有样品均未六角纤锌矿结构,呈(002)晶面择优生长;当冰乙酸掺入量大于0.02及其以上工艺条件时,获得的薄膜具有六角片状表面形貌;ZnO薄膜电阻率可达到10-1Ω.cm,同时在400~2 000 nm的宽谱范围内的透过率能够达到80%以上。
A ZnO thin film was prepared on an alkali - free glass substrate by ultrasonic spray pyrolysis (USP) and zinc acetate (Zn (CH3COO) 2.2H2O) as raw materials. The results of pH value, structural properties, surface morphology, electrical and optical properties of ZnO thin films show that glacial acetic acid has an important effect on the growth rate of ZnO thin films. X-ray diffraction (XRD) and scanning electron microscopy (SEM) tests showed that all the samples did not have hexagonal wurtzite structure and were preferentially grown in the (002) crystal plane. When the amount of glacial acetic acid was more than 0.02 and above, The obtained film has a hexagonal flake surface morphology; the resistivity of the ZnO film can reach 10-1Ω.cm, and the transmittance in the broad spectrum range of 400-2000 nm can reach more than 80%.