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本文从大束流离子注入的真空环境及对离子注入机性能影响的角度，讨论了大束流离子注入机真空系统的布置和设计。
In this paper, the layout and design of the vacuum system of a large beam ion implanter are discussed in terms of the vacuum environment of large beam ion implantation and the influence on the performance of ion implanter.