日本电气中央研究所重新研究了声表面波换能器的铝电极的微型加工技术,并在9月份的国际固体器件会议上提出了报告。声表面波换能器通常都采用叉指电极的形状,随着频率的提高(几百兆赫),由于电极本身的质量附加效应,使变换特性的对称性受到损害,发生 The National Institute of Electrical and Electronics of Japan (NEC) re-examined the micromachining technology of SAW transducer aluminum electrodes and presented a report at the International Solid State Devices Conference in September. Surface acoustic wave transducers are usually in the shape of interdigital electrodes. As the frequency increases (several hundred megahertz), the symmetry of the transforms is compromised due to the mass-added effect of the electrodes themselves,