论文部分内容阅读
A quasi|thermodynamic model of MOVPE growth of In- x Al 1- x N alloy with TMAl,TMIn and ammonia as sources has been proposed.In this improved model,the effect of low decomposition rate of ammonia has been considered and the number of moles is used to express the mass conservation constraints of element N,H,Al and In.It is assumed that the alloy is synthesized by the reactions between ammonia and group Ⅲ elements.The results show that it is more difficult to grow the In-xAl 1-x N alloy,especially for the In-xAl_(1-x)N lattice matched the GaN.In order to enhance the incorporation of indium into InAlN,we should use the lower growth temperature,optimized input Ⅴ/Ⅲ ratio and high nitrogen fraction in the carrier gas.In addition,the decomposed fraction of ammonia should be reduced.Indium droplets would be deposited if the growth conditions have not been selected properly.
A quasi | thermodynamic model of MOVPE growth of In - x Al 1- x N alloy with TMAl, TM In and ammonia as sources has been proposed. In this improved model, the effect of low decomposition rate of ammonia has been considered and the number of moles is used to express the mass conservation constraints of element N, H, Al and In. It is assumed that the alloy is synthesized by the reactions between ammonia and group III elements. The results show that it is more difficult to grow the In - xAl1-xN alloy, especially for the In - xAl_ (1-x) N lattice matched the GaN.In order to enhance the incorporation of indium into InAlN, we should use the lower growth temperature , optimized input Ⅴ / Ⅲ ratio and high nitrogen fraction in the carrier gas. addition, the decomposed fraction of ammonia should be reduced .Indium droplets would be deposited if the growth conditions have not been selected properly.