,Comparison between Dual Radio Frequency-and Pulse-Driven Sheath near Insulating Substrates

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We carry out a comparison between the characteristics of radio frequency-and pulse-sheath near insulating substrates driven by dual frequency(DF)sources making use of the fluid model in which the self-bias voltage on the electrode is obtained consistently under a current balance condition.The results show that the combination of the higher and lower frequency source modulate the characteristics of the radio-frequency-and pulse-sheath:the higher frequencymakes the physical quantities oscillate fast while the slow oscillating contour of variation in physical quantities is modulated by the lower frequency source.However,there are some differences between the capacity of mitigating the charging effects on the surface of the insulator,i.e.,the pulsed driven plasma gains an the insulating surface to neutralize the positive charge due to the incident ion as the pulse being in the pulses duty.In addition,the ion energy distribution(IED)bombarding the surface of the insulator has a range of energy for the radio-frequency bias while that for the pulse bias is discontinuous.
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