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纳米压印模板通常需要经过电子束光刻、电子束沉积、光刻胶剥离、反应离子刻蚀等一系列复杂工艺获得,这使得纳米压印模板的制作难度大,成本高.寻找一种灵活简单的纳米压印模板制备方法以提升纳米压印模板的制作效率,是广泛应用纳米压印技术的研究重点和难点.本文以写好光栅结构的电子束光刻胶层为母模板,获得聚二甲基硅氧烷软模板,并以此为模板对共轭高分子聚(9,9-二辛基)芴薄膜进行纳米压印,实现光栅结构转移,成功制备出纳米光栅结构的共轭高分子薄膜.偏振吸收谱和透射电镜结果表明,纳米压印实现图案转移的同时,还可以将共轭高分子的主链控制在光栅条纹方向,这将对有机发光器件性能的提升具有重要的意义.研究结果还表明,应用该方法同样可以对聚(9,9-二辛基芴共苯并噻二唑)薄膜进行光栅图案化,同时实现其取向控制.
The nano-imprint template usually needs to be obtained through a series of complex processes such as electron beam lithography, electron beam deposition, photoresist stripping and reactive ion etching, which makes the nano-imprint template difficult and costly to find. A simple preparation method of nanoimprint template to enhance the production efficiency of nanoimprint template is the research focus and difficulty of widely applying nanoimprint technology.Based on the written e-beam photoresist layer with grating structure as the master template, poly Dimethylsiloxane soft template, and as a template for the conjugated polymer poly (9,9-dioctyl) fluorene film nanoimprint, to achieve the grating structure transfer, the successful preparation of the conjugate nanostructure grating The results of polarization absorption spectra and transmission electron microscopy show that the main chain of the conjugated polymer can be controlled in the direction of the grating fringes while realizing the pattern transfer by the nanoimprint, which is of great importance for improving the performance of the organic light emitting device The results also show that this method can also be poly (9,9-dioctylfluorene-benzothiadiazole) film grating patterning, while achieving its orientation control.