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电子束物理气相沉积技术被采用制备大尺寸高温合金薄板,靶基距和不同坩埚中锭料蒸发速率对厚度均匀性的影响规律被研究。研究结果表明,靶基距对锭料的有效蒸发效率和厚度均匀性具有重要影响。靶基距低,有效蒸发效率高,反之,靶基距高,有效蒸发效率低。靶基距与锭料的有效蒸发效率成反比关系。调整不同坩埚中锭料蒸发速率,可获得不同的薄板厚度分布。当靶基距为h=50 cm,2号坩埚蒸发量为83%,4号坩埚蒸发量为17%时,沉积薄板厚度分布均匀性最好,在r≤450 mm范围内薄板厚度分布满足国家薄板厚度公差标准。理论计算与实验结果相符合表明模型合理。
Electron beam physical vapor deposition technology was used to prepare large-size high-temperature alloy sheet, the target base distance and different crucible ingot evaporation rate on the thickness uniformity of the law. The results show that the target base distance has an important effect on the effective evaporation efficiency and thickness uniformity of the ingot. The target base distance is low, the effective evaporation efficiency is high, on the contrary, the target base distance is high, and the effective evaporation efficiency is low. The target base distance is inversely proportional to the effective evaporation efficiency of the ingot. Adjusting the rate of ingot evaporation in different crucibles yields different sheet thickness distributions. When the base distance of the target is h = 50 cm, the crucible evaporation on the 2nd is 83% and the crucible evaporation on the 4th is 17%, the thickness distribution of the deposited sheet is the best. The distribution of the thickness of the sheet satisfies r Sheet thickness tolerance standard. The theoretical calculation and experimental results show that the model is reasonable.