在半导体领域中,利用超声技术测试有许多优点:能迅速得到图像;分辨率高.要实现高分辨率图象,需要短波、高频的超声源,一般采用薄层压电晶体传感器.在各类图像观察系统中,无论是光学显微镜还是扫描电子显微镜,或者是声波显微镜,系统的最终分辨率都是受源的半波长限制的,因而只有一定尺寸的检测器才能实现高分 In the field of semiconductors, the use of ultrasonic testing has many advantages: rapid image acquisition; high resolution; short wave and high frequency ultrasonic sources are required to achieve high resolution images, and thin piezoelectric crystal sensors are generally used In a class image viewing system, the final resolution of a system, whether it is an optical microscope or a scanning electron microscope, or a sonic microscope, is limited by the half-wavelength of the source so that only a detector of a certain size can achieve a high score