论文部分内容阅读
采用真空阴极电弧沉积技术,在TC11钛合金表面沉积同等厚度的三种不同调制周期Ti-Ti N-Zr-Zr N软硬交替多层膜。用扫描电镜、显微硬度计、结合力划痕仪和砂粒冲刷试验仪分析测试了多层膜的厚度、表面及截面形貌、硬度、膜/基结合力和抗砂粒冲蚀磨损性能等;重点研究了调制周期的改变对多层膜性能的影响。结果表明:随着周期数的增加,单一调制周期变薄,膜层中金属“液滴”颗粒等缺陷减少,同时也增加了大量的层间界面;层界面之间反复形核,晶粒细化,有利于多层膜表面光洁度、致密度、硬度、结合力和抗砂粒冲蚀能力的改善。
The vacuum cathodic arc deposition technique was used to deposit Ti-Ti N-Zr-Zr N hard and soft alternating multilayers of the same thickness on the surface of TC11 titanium alloy. The thickness, surface and cross section morphology, hardness, film / substrate bond strength and erosive wear resistance of the multilayer films were analyzed by scanning electron microscopy, microhardness tester, cohesive force scratch tester and sand erosion tester. The influence of the modulation period on the performance of multilayers was mainly studied. The results show that with the increase of the number of cycles, the period of single modulation becomes thinner and the defects such as metal droplet ’s particles in the film decrease. At the same time, a large number of interfacial interfaces are added. Grain refinement, is conducive to multilayer film surface finish, density, hardness, adhesion and sand erosion resistance improvement.