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本文叙述了一种提高双波长相移干涉测量性能的方法。通过引入第三种波长的相位数据,就能测量某种异常陡峭的波前的相位。实验是利用一个线性探测器阵列测量一个离轴抛物面的表面度来完成高的。对于被测的波前,探测器两相邻象素(pixels)之间的光程差达3.3个波。求出五组数据的瞬时平均值之后,测量的可重复性均优于25A°(均方值λ=6328°)。
This article describes a method for improving the performance of dual-wavelength phase-shift interferometry. By introducing phase data of the third wavelength, one can measure the phase of an anomalously steep wavefront. Experiments use a linear detector array to measure the surface degree of an off-axis parabola to achieve high. For the wavefront under test, the optical path difference between two adjacent pixels of the detector reaches 3.3 waves. After obtaining the instantaneous average of the five sets of data, the repeatability of the measurements was better than 25A ° (mean square λ = 6328 °).