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高g加速度计具有高过载、高响应速度、高环境压力以及体积小和价格低等特点。我们开发的新型电容式加速度计,具有10万g的量程,能够实现高g环境下的加速度测量,满足了用户的要求。基于有限元模拟和经验数值结合的办法,在大量程和灵敏度之间综合考虑,确定了高g的设计思路,并采用硅溶片工艺制备了满足设计要求的MEMS加速度计。
High g accelerometer with high overload, high response speed, high ambient pressure and small size and low price. We developed a new type of capacitive accelerometer, with 100,000 g of range, to achieve acceleration measurements in high-g environment to meet the user’s requirements. Based on the combination of finite element simulation and empirical numerical analysis, the design idea of high g was determined considering the large range and sensitivity, and the MEMS accelerometer satisfying the design requirements was prepared by the silicon dissolution process.