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人工合成金刚石薄膜最重要的应用前景之一是有可能成为新一代高温、高频、大功率半导体器件的材料,但由于多晶金刚石膜中颗粒的晶向分布杂乱,而且存在大量的晶粒间界和缺陷,大大地影响了膜的质量,不可能用以制造高性能的电子器件,所以人们一直在致力于金刚石外延膜的研究.1992
Synthetic diamond film is one of the most important application prospects is likely to become a new generation of high temperature, high frequency, high-power semiconductor device materials, but the polycrystalline diamond film grain distribution disorderly, and there is a large number of intergranular Boundaries and defects have greatly affected the quality of the film and can not be used to make high-performance electronic devices, so people have been devoted to the research of diamond epitaxial films.