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设计了一套基于射频电容耦合放电原理的大气等离子体抛光原型装置,电容耦合等离子体炬首次被应用到了抛光系统中。针对SiC反射镜的加工实验结果表明,系统工作正常,并可以实现亚纳米级的表面粗糙度。
A set of atmospheric plasma polishing prototype device based on the principle of RF capacitive coupling discharge was designed. The capacitive coupling plasma torch was firstly applied to the polishing system. The experimental results of the SiC mirror processing system show that the system works well and can achieve the sub-nanometer surface roughness.