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随着热处理温度上升，在SiO2／Si衬底上溅射的Pt、Pt／Ti电极中，构成Pt薄膜的晶粒由小变大，由分布均匀到晶粒局部聚集，最后分离成小岛.Ti层可提高Pt薄膜与基片间的粘附性和高温下的稳定化快速热处理可提高Pt薄膜在高温下的连续性.并研究了Pt薄膜对PLT铁电薄膜的成品率和分散性的影响.
With the increase of the heat treatment temperature, the Pt and Pt / Ti electrodes sputtered on the SiO2 / Si substrate are characterized in that the grains forming the Pt thin film grow from small to large, distribute uniformly to the local aggregation of grains, and finally separate into small islands. Ti layer can improve the adhesion between Pt film and substrate and stabilize at high temperature Rapid thermal treatment can improve the continuity of Pt film at high temperature.The effects of Pt film on the yield and dispersion of PLT ferroelectric thin film influences.