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致冷机低温泵的抽气效率主要取决于冷阵的结构,为了提高抽气效率,在结构设计上所需采取的措施往往是互相矛盾的,难以协调,致使目前的致冷机低温泵对 H2、 He、 Ne这类非凝性气体的抽气效率都较低,这一弱点对于小口径致冷机低温泵尤为突出。 本文着重分析了冷阵结构对致冷机低温泵抽气效率和其它性能的影响因素,提出了结构设计的基本原则,介绍了作者依此而设计出的一种新型冷阵结构的致冷机低温泵。结构设计是借助了蒙特卡洛方法而完成的。作者在口径为φ150毫米的致冷机低温泵中使用了这种结构,进行了性能测试,实验结果同理论计算值基本一致。 测试结果表明,该泵对N2、Ar等可凝性气体的抽气效率为0.36~0.37,接近国外同口径致冷机低温泵的最高指标(0.38),对H2、He,等非凝性气体的抽气效率达0.26,大大超过了国外同口径致冷机低温泵的最高指标(0.13)。
Cryogenic pump cryogenic pump suction efficiency depends mainly on the structure of the cold array, in order to improve the suction efficiency, the structural design required to take measures are often contradictory and difficult to coordinate, resulting in the current cooler cryogenic pump The non-condensable gases such as H2, He and Ne have low suction efficiency, especially for the cryogenic pump with small diameter. This paper focuses on analyzing the influence of the cooling array structure on the suction efficiency and other properties of the cryogenic pump of the refrigerator, puts forward the basic principles of the structure design, and introduces a new type of refrigerator with a cold array structure designed by the author Cryogenic pump. Structural design is done with the aid of the Monte Carlo method. The author used this kind of structure in the cryogenic pump with a diameter of φ150 mm and performed the performance test. The experimental results are basically the same as the theoretically calculated values. The test results show that the suction efficiency of the pump for condensable gases such as N2 and Ar is 0.36 ~ 0.37, which is close to the highest level (0.38) , And other non-condensable gas extraction efficiency of 0.26, much higher than the highest caliber cooler cryogenic pump with the highest indicator (0.13).