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采用真空反应蒸发技术，在聚酯薄膜基片上制备出高质量的ＩＴＯ透明导电薄膜，对薄膜的结构和光电特性及制备条件对薄膜性能的影响进行了研究
The vacuum reactive evaporation technique was used to prepare high quality ITO transparent conductive films on polyester film substrates. The effects of the film structure and the photoelectric properties and the preparation conditions on the film properties were studied