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为了提高毛细管放电类氖氩46.9 nm软X射线激光的强度,研究了工作介质中气体的掺杂对激光强度的影响。研究表明,在纯Ar中掺入适量的He显著地提高了激光的输出强度。通过对比在Ar中掺入Ne、N2以及Kr等其他气体的实验,系统地分析了He的掺入对等离子温度的影响,找到了在特定工作气压下最佳的掺杂比,有利于进一步提高毛细管放电46.9 nm软X射线激光的强度。在放电等离子体极紫外光刻(EUVL)光源研究过程中,也采用了在Xe中掺入适量He的方式以提高13.5 nm的输出强度。
In order to improve the intensity of 46.9 nm soft X-ray laser of neon-argon discharge capillary tube, the effect of gas doping on laser intensity in working medium was studied. The research shows that the incorporation of appropriate amount of He in pure Ar significantly increases the laser output intensity. By comparing the experiments of adding Ar, N2, Kr and other gases, the influence of He on the plasma temperature was systematically analyzed, and the best doping ratio under certain working pressure was found, which is beneficial to further increase Capillary discharge 46.9 nm soft X-ray laser intensity. In the research of discharge plasma EUVL, we also adopted the method of adding appropriate amount of He in Xe to improve the output intensity of 13.5 nm.