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采用PECVD方法，分别注积了SnO2-Fe2O3、SnO2-TiO2-Fe2O3等双层和三层气敏薄膜材料，制成了旁热式传感器。实验结果表明，这种多层结构的元件对乙醇有很高的灵敏度与选择性。
The double-layer and triple-layer gas-sensitive thin films such as SnO2-Fe2O3, SnO2-TiO2-Fe2O3 were deposited by PECVD method, respectively. The experimental results show that the multi-layer structure of the components of ethanol has a high sensitivity and selectivity.