1.引言硅单晶在整个天然、人工单晶中是最完美的晶体,完全不含有宏观位错,杂质浓度又低,直径3吋的晶体已大量生产。硅单晶制造法有直拉法(简称 CZ 法)及悬浮区熔法(简称 FZ 法)。现在,前者主要用来制造集成电路用晶体,后者主要制作功率 1. INTRODUCTION Silicon single crystal is the perfect crystal in the whole natural and artificial monocrystal. It contains no macroscopic dislocation at all, low impurity concentration and 3-inch diameter crystal have been mass-produced. Silicon single crystal manufacturing method Czochralszka method (referred to as CZ method) and the suspension zone melting method (referred to as FZ method). Now, the former is mainly used to manufacture integrated circuit crystals, which mainly make power