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采用阴极电弧离子镀和等离子体增强化学气相沉积(PECVD)相结合的技术方法,在304不锈钢基体上分别沉积制备了Ti/DLC和Ti/Ti N/Ti Al N/DLC复合涂层。选用原子力显微镜、拉曼光谱对涂层的形貌和结构进行表征测试。同时,利用显微硬度计、划痕测试仪系统地分析了涂层的显微硬度和界面结合性能,并研究了其摩擦磨损行为。研究结果表明:Ti/Ti N/Ti Al N/DLC复合涂层体系具有较高硬度(~2130HV)的同时结合性能最优(结合力~53.7 N),抗磨损能力最强。在相同试验条件下,无涂层的基体摩擦系数为0.45,单层DLC、Ti/DLC和Ti/Ti N/Ti Al N/DLC涂层的摩擦系数则分别为0.15、0.12和0.07。Ti/Ti N/Ti Al N/DLC复合涂层可有效提高304不锈钢的耐磨损性能,降低摩擦系数。
Ti / DLC and Ti / TiN / TiAl N / DLC composite coatings were deposited on 304 stainless steel substrates by cathodic arc ion plating and plasma enhanced chemical vapor deposition (PECVD). Atomic force microscopy and Raman spectroscopy were used to characterize the morphology and structure of the coatings. At the same time, the microhardness tester and scratch tester were used to systematically analyze the microhardness and interfacial bonding properties of coatings and to study their friction and wear behavior. The results show that the Ti / TiN / TiAl N / DLC composite coating system has the highest hardness (~ 2130HV) and the best bonding performance (bonding strength ~ 53.7 N), with the strongest wear resistance. Under the same experimental conditions, the friction coefficient of the uncoated substrate was 0.45, and the friction coefficients of the single-layer DLC, Ti / DLC and Ti / TiN / TiAl N / DLC coatings were 0.15, 0.12 and 0.07, respectively. Ti / Ti N / Ti Al N / DLC composite coating can effectively improve the wear resistance of 304 stainless steel, reduce the friction coefficient.