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为了实现在工作现场对氦质谱检漏仪进行全量程漏率示值的校准,设计了一套便携式气体微流量计。该流量计由供气与抽气系统、定容室与压力测量系统、流量测量系统和烘烤系统等四部分组成,采用固定流导法及定容法两种模式提供和测量流量。在流量计的设计中,解决了小孔流导的设计和计算、定容室和抽气系统的小型化设计、应用选择性抽气技术延伸流量测量下限等关键技术,同时还采用了分体式结构设计,使流量计具有便于拆卸及携带,操作简单等优点。流量计预计达到的技术指标是,测量范围(:10-4～10-11)Pa.m3/s,标准不确定度小于10%。
In order to calibrate the full-scale leakage rate of Helium Mass Spectrometer Leak Detector at work site, a portable gas micrometer was designed. The flowmeter consists of gas supply and exhaust system, fixed chamber and pressure measurement system, flow measurement system and baking system, and other four parts, the use of fixed flow method and constant volume method to provide and measure the flow of two modes. In the design of flowmeter, we solved the design and calculation of pinhole guide, the miniaturization design of fixed chamber and exhaust system, the application of selective extraction technology to extend the lower limit of flow measurement and other key technologies. At the same time, Structural design, the flow meter has easy to remove and carry, easy operation and so on. Flowmeter is expected to meet the technical indicators, the measurement range (: 10-4 ~ 10-11) Pa.m3 / s, the standard uncertainty of less than 10%.