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本文介绍了一种离子敏场效应管（ＩＳＦＥＴ）与库仑滴定分析技术相结合而形成的固态库仑滴定传感器．采用ＭＯＳＩＣ工艺和硅微机械加工技术制成了尺寸为６×７ｍｍ２上面含有ＩＳ－ＦＥＴ敏感元件及执行元件的工作管芯，可对有效滴定体积约为０．２μＬ的酸碱溶液在３０秒内完成库仑滴定分析，其分析结果与常规的容量分析相一致．
This article describes a solid state coulometric titration sensor that combines ISFET with coulometric titration. Using MOSIC process and silicon micromachining technology, a working die with 6 × 7mm2 IS-FET sensor and actuator is made. It can effectively titrate the acid-base solution with the volume of about 0.2μL in 30 seconds Coulometric titration was completed and the results were consistent with the conventional capacity analysis.