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本文叙述了FZ硅及CZ硅的中子嬗变法的原理、方法及其在功率元件、敏感元件、集成电路中的应用.介绍了该法的优越性及存在的问题,展望了该法的未来.
This paper describes the principle and method of neutron transmutation of FZ silicon and CZ silicon and their application in power components, sensitive components and integrated circuits.The advantages and disadvantages of this method are introduced, and the future of this method is prospected .