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对制取超微钨粉的化学气相沉积(CVD)过程进行了热力学分析,并采用CVD技术,以扩大规模研究了超微钨粉的制取工艺。热力学分析表明,在1000-1500K的温度范围内,实际上进行的是五氯化钨和四氯化钨的氢还原。W-Cl-H体系的高温平衡气相主要是由WCl_4组成,温度对高温平衡气相组成的影响很小,实际上不大的氢气过量即能完成还原过程。研究了工艺过程的主要参数对超微钨粉质量的影响,并得出了最佳工艺条件。
The chemical vapor deposition (CVD) process of making ultrafine tungsten powder was carried out thermodynamics analysis, and CVD technology was used to study the preparation process of ultrafine tungsten powder. Thermodynamic analysis shows that at temperatures in the range of 1000-1500 K, the reduction of hydrogen with tungsten pentachloride and tungsten tetrachloride is actually carried out. W-Cl-H system at high temperature is mainly composed of WCl_4 vapor phase equilibrium, the temperature of the high-temperature equilibrium gas phase composition is very small, in fact, not too much hydrogen to complete the reduction process. The influence of the main parameters of the process on the quality of ultrafine tungsten powder was studied and the optimum technological conditions were obtained.