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针对传统基于连续流假设的N-S方程无法准确描述约束环内稀薄气体问题,采取二次优化策略,确定了CFD-ACE+中基于努森数的粘度修正公式参数a、b的最优值分别为0.12和1.40。对约束环内气体流动进行模拟仿真,结果表明:利用本文中的粘度修正公式,可以使约束环内稀薄气体的模拟仿真结果与实验测量值相一致,该公式在较宽的入口流量范围(200~2000m L/min之间)内应用均可控制仿真结果的相对偏差在±3%之内,其精度满足实际工程需要;并且,获得粘度修正公式参数的方法同样适用其它微通道内稀薄气体的研究,对相同工况下类似刻蚀腔室内气流仿真、新机型设计等亦有很大的指导意义。
Aiming at the problem that traditional NS equations based on continuous flow theory can not accurately describe the lean gas in the confinement ring, a second optimization strategy is adopted to determine the optimal values of the a and b based on Knudsen number of viscosity correction formula in CFD-ACE + are 0.12 And 1.40. The simulation results show that the simulation results of the lean gas in the confinement ring can be consistent with the experimental measurements by using the viscosity correction formula in this paper. The formula can be used in a wide range of inlet flow rate (200 ~ 2000m L / min) within the application can control the relative deviation of the simulation results within ± 3%, the accuracy to meet the needs of the actual project; and, viscosity correction formula to obtain the parameters of the method is also applicable to other micro-channel thin gas Research, on the same conditions similar to the etching chamber airflow simulation, the new model design is also of great guiding significance.