宏多孔硅基于MEMS技术,通过清洗、氧化、光刻和湿法刻蚀等工艺流程制备,其大比表面积的多孔三维结构可作为很好的骨架结构。以宏多孔硅为基底,在其表面以及通道内沉积集流层,制备的宏孔导电网络可作为微型储能器件电极的衬底。实验改进了传统浸泡的沉积方法,使其优化为液流沉积,显著改善了集流层沉积不均匀现象。改善后的宏孔导电网络集流层均匀性良好,在作为储能器件的衬底时,可以更好地沉积活性物质,增强其黏附性、扩大储能器件的容量,并在后续储能器件的循环测试中起到大幅度提高稳定性的作用。 Macroporous silicon is based on MEMS technology and is prepared by the processes of cleaning, oxidation, photolithography and wet etching. The porous three-dimensional structure with large specific surface area can be used as a good framework structure. Macroporous silicon as the substrate, the surface and the channel deposition of the collector layer, the prepared macro-porous conductive network can be used as a micro-energy storage device electrode substrate. Experiments improved the traditional immersion deposition method, making it optimized for flow deposition, significantly improving the uneven deposition of the current layer. The improved macropore conductive network has a good uniformity of the current collecting layer. When used as a substrate of an energy storage device, the active material can be deposited better, the adhesion of the macroscopic conductive network can be enhanced, the capacity of the energy storage device can be enlarged, The cycle test plays a substantial role in improving stability.