金刚石由于它在力学、热学、光学及电子学方面极其优异的性能和最近它在低压合成方面的成功，近年来它的研究和开发吸引了很多人，形成了一股热潮。但是也遇到了困难，其中最突出的是，对金刚石膜的生长和形核机理还不很清楚，使得人们不能很好地控制膜的生长和质量，来满足实 Diamond has attracted a great deal of research and development in recent years due to its extremely superior mechanical and thermal, optical and electronic properties and its recent success in low-pressure synthesis. But also encountered difficulties, the most prominent of which is the mechanism of growth and nucleation of diamond film is not yet clear, so that people can not well control the growth and quality of the film to meet the real