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本文指出四点弯曲法是定性分析和定量计算气相沉积薄膜与基体结合强度的较理想 的方法。还建立了四点弯曲法定量计算膜基结合强度的公式。
This paper points out that the four-point bending method is a more ideal method to qualitatively analyze and quantitatively calculate the bonding strength between the vapor-deposited film and the substrate. Also established a four-point bending method for quantitative calculation of film-based bonding strength formula.