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采用HF酸刻蚀和紫外激光预处理相结合的方式提升熔石英元件的负载能力,用质量分数为1%的HF缓冲溶液对熔石英刻蚀1~100 min,综合透过率、粗糙度和损伤阈值测试结果,发现刻蚀时间为10min的熔石英抗损伤能力最佳。采用355 nm紫外激光对HF酸刻蚀10 min的熔石英进行预处理,结果表明:紫外预处理能量密度在熔石英零损伤阈值的60%以下时,激光损伤阈值单调递增;能量到达80%时,阈值反而低于原始样片的损伤阈值。适当地控制酸蚀时间和紫外激光预处理参数能有效提高熔石英的抗损伤能力。
The method of hydrofluoric acid etching combined with UV laser pretreatment was adopted to improve the load capacity of fused silica. The fused quartz was etched for 1 ~ 100 min with 1% HF buffer solution. The comprehensive transmittance, roughness and Damage threshold test results showed that the corrosion time of 10min fused quartz best anti-damage ability. The results show that laser damage threshold monotonically increases when UV pretreatment energy density is less than 60% of the zero damage threshold of fused silica; when the energy reaches 80% , The threshold value is lower than the damage threshold of the original sample. Appropriate control of etching time and UV laser pretreatment parameters can effectively improve the anti-damaging ability of fused silica.