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从质量块结构和梁结构2个方面进行分析,指出了定齿偏置质量块结构和折叠梁的梳齿式微机械加速度计的综合性能最好,并通过分析计算出了折叠梁在检测方向的刚度,为电容式惯性传感器进一步优化设计奠定了坚实的理论基础。
From the two aspects of the mass structure and the beam structure, it is pointed out that the combed tooth micro-mechanical accelerometer has the best overall performance of the tooth offset mass structure and the folding beam, and the bending strength of the folded beam in the detection direction Stiffness has laid a solid theoretical foundation for the further optimization design of capacitive inertial sensors.