论文部分内容阅读
采用直流磁控溅射和后退火氧化的方法在掺铝氧化锌(AZO)导电玻璃上制备了二氧化钒(VO2)薄膜,研究了不同的退火温度、退火时间对VO2/AZO复合薄膜制备的影响,并对复合薄膜的结构、组分、光电特性进行了测试与分析.结果表明,导电玻璃上的AZO没有改变VO2的取向生长,但明显改变了VO2薄膜的表面形貌特征.与用相同工艺和条件在普通玻璃基底上制备的VO2薄膜相比,VO2/AZO复合薄膜的相变温度降低约25?C,热滞回线宽度收窄至6?C,相变前后可见光透过率均在50%以上,1500 nm处红外透过率约为55%和21%,电阻率变化达3个数量级.该复合薄膜表面平滑致密,制备工艺简单,性能稳定,可应用于新型光电器件.
The vanadium dioxide (VO2) thin films were prepared on the aluminum doped aluminum oxide (AZO) conductive glass by direct current magnetron sputtering and annealing. The effects of different annealing temperature and annealing time on the fabrication of VO2 / AZO composite thin films The results show that the AZO on the conductive glass does not change the orientation growth of VO2, but obviously changes the surface topography of the VO2 thin film.With the same VO2 / AZO composite thin film phase transition temperature decreased by about 25? C, the thermal hysteresis loop width narrowed to 6? C, the visible light transmittance before and after the phase transition At 50% and 1500 nm, the infrared transmittance is about 55% and 21%, respectively, and the resistivity changes by 3 orders of magnitude. The composite film has smooth and compact surface, simple preparation process and stable performance, and can be applied to new optoelectronic devices.