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本文详细地介绍了对真空锁关键部件碟阀的改进，达到提高真空度、进而提高质谱 计性能、改善谱线质量的目的。
This article describes in detail the improvement of the vacuum valve lock valve key components to achieve the goal of improving the degree of vacuum, thereby improving the performance of the spectrometer and improving the quality of the spectrum.