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根据有限厚度样品体电阻率和薄层电阻两种测试方法间的厚度修正系数的相关性,论证了其边缘效应修正系数具有一一对应的严格的相等性。通过实验予以证明,并可将这一结论应用于非圆心点测试。
According to the correlativity of the thickness correction coefficient between the two kinds of test methods of the volume resistivity and the sheet resistance of a finite thickness sample, the strict equality of the edge effect correction coefficients is demonstrated. It is proved through experiment that this conclusion can be applied to non-center point test.