论文部分内容阅读
ＣＡＤ／ＣＡＥ技术在ＭＥＭＳ（ＭｉｃｒｏＥｌｅｃｔｒｏＭｅｃｈａｎｉｃａｌＳｙｓｔｅｍｓ）研究过程中具有非常重要的作用．本文首先介绍了用于ＭＥＭＳ的ＣＡＤ／ＣＡＥ技术特点，然后研究了ＭＥＭＳＣＡＤ／ＣＡＥ系统结构，给出了软件支持工具结构框图，指明了解决其中关键技术的途径．ＣＡＤ／ＣＡＥ技术的应用，将提高微型机电系统的设计质量，缩短研制周期，使之及早走向工业化．
CAD / CAE technology in the MEMS (MicroElectroMechanicalSystems) research process has a very important role. This paper first introduces the features of CAD / CAE technology used in MEMS, then studies the structure of MEMSCAD / CAE system, gives the structural block diagram of software support tools and points out the ways to solve the key technologies. The application of CAD / CAE technology will improve the design quality of MEMS, shorten the development cycle and make it industrialized as soon as possible.