【摘 要】
：
数字莫尔条纹滤波处理是利用莫尔条纹进行非球面检测的关键技术之一,滤波结果直接影响非球面检测的精度,分别从空域和频域两个角度对滤波算法进行了讨论分析,并进行了模拟实
【机 构】
：
中国科学院长春光学精密机械与物理研究所光学技术中心,中国科学院研究生院,吉林建筑工程学院,
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数字莫尔条纹滤波处理是利用莫尔条纹进行非球面检测的关键技术之一,滤波结果直接影响非球面检测的精度,分别从空域和频域两个角度对滤波算法进行了讨论分析,并进行了模拟实验。结果表明,经两种方法处理后恢复的波面得到了较好的结果,全孔径相位分布残差的均方根(RMS)值分别为0.024λ和0.035λ,证明了滤波方法是可行的。
Digital Moire fringe filtering is one of the key technologies to detect aspheric surface by Moire fringes. The filtering results directly affect the accuracy of aspheric surface detection. The filtering algorithm is discussed and analyzed from two aspects of airspace and frequency domain respectively. The simulation experiment. The results show that the wavefront recovered by the two methods has good results, and the root mean square (RMS) values of the full aperture phase distribution are 0.024λ and 0.035λ respectively. It is proved that the filtering method is feasible.
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