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我们从晶体生长学的观点评述了单晶的湿法化学腐蚀。出发点是晶体存在光滑表面和粗糙表面。光滑表面的动力学是由粗糙表面所缺乏的成核势垒控制，所以后者腐蚀速率要快几个数量级。对金刚石晶体结构的分析表明，在此晶格中（１１１）面是唯一的光滑表面，其它面只不过由于表面重构有可能是光滑的。这样，我们解释了〈００１〉方向在ＫＯＨ∶Ｈ２Ｏ中的最小腐蚀速率。关于接近〈００１〉方向具有最小腐蚀速率时的腐蚀状态和在ＨＦ∶ＨＮＯ３基溶液中从各向同性腐蚀向各向异性腐蚀转换的两个关键假设，都用实验进行了检测。结果与理论一致
We review the wet chemical etching of single crystals from the viewpoint of crystal growth. The starting point is that the crystal has a smooth surface and a rough surface. The kinetics of a smooth surface are governed by the nucleation barrier that the rough surface lacks, so the corrosion rate of the latter is several orders of magnitude faster. The analysis of the diamond crystal structure shows that the (111) plane is the only smooth surface in this lattice, and the other faces may only be smooth due to the surface reconstruction. In this way, we explain the minimum corrosion rate in KOH: H2O for the <001> direction. Two key hypotheses about the corrosion state with the smallest corrosion rate near the <001> direction and the transition from isotropic corrosion to anisotropic corrosion in the HF: HNO3-based solution were experimentally tested. The result is consistent with the theory