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精密、超精密加工技术的发展使得误差分离技术得到了广泛的研究及应用 ,并取得很大的进展。但以往对误差分离技术的研究 ,大多是针对具体误差的在线测量和分离的实现或是提高测量精度的措施 ,而对各种误差分离技术之间的关系及不同误差分离技术的共同点比如时域、频域分离方法的异同等研究不足。本文针对这一问题作较为详尽的分析 ,并从分离方法的传递特性入手 ,阐明误差分离技术时域和频域分离方法本质上的一致性 ,不同之处仅在于表达方式的区别。
The development of precision and ultra-precision machining technology has made the error separation technology widely researched and applied and made great progress. However, in the past, the research of error separation technology mostly focused on the implementation of specific measurement and separation of specific errors or measures to improve the measurement accuracy. However, the relationship between various error separation techniques and the similarities of different error separation techniques The similarities and differences between domain and frequency domain separation methods are not enough. In this paper, a more detailed analysis of this issue, starting with the transfer characteristics of the separation method, illustrates the essential consistency of the error separation technique in the time and frequency domain separation methods, with the only difference being the expression method.