论文部分内容阅读
本文基于双光栅法测量准直性原理，在550mm的平行光管上完成了一系列的实验研究，相对测量精度达到0．036％，并对误差源及提高测量精度的方法作了一定的分析。
In this paper, based on the principle of double grating measurement collimation, a series of experimental studies have been carried out on a 550mm collimator with a relative measurement accuracy of 0.036%. The error sources and methods to improve the measurement accuracy are also analyzed. .