等离子真空处理室是在高温高腐蚀条件下工作,环境严峻。美国专利发明的US6521046介绍的一种Al-Cu-MgSi合金是可在很大程度上满足这种要求的合金,它具有优异的抗热裂性能,又具有很强的抗腐蚀性能,在高温腐蚀环境中不产生污染物,又有良好的可焊性,是制造等离子处理设备如生产半导体和液晶显示屏真空室等的良好材料。该合 Plasma vacuum chamber is working under high temperature and high corrosion conditions, the environment is grim. An alloy of Al-Cu-MgSi described in U.S. Patent No. 6,521,046 of the U.S.Patent is an alloy which can largely satisfy this requirement. It has excellent resistance to hot cracking and also has a strong corrosion resistance. High temperature corrosion Environment does not produce pollutants, but also has good solderability, is the manufacture of plasma processing equipment such as the production of semiconductors and liquid crystal display vacuum chamber and so on a good material. The combination