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硅化铂红外焦平面探测器具有响应光谱宽、规模大、均匀性好、时间稳定性高、制造成本低等优点,在多/宽光谱成像、激光探测、天文观测、医疗检测等领域具有应用潜力,但NETD 100 mK的灵敏度对其广泛应用有一定的限制。文中从该探测器的量子效率和填充因子两方面总结和分析了国内外的改进技术,重点分析了光腔结构、多孔硅结构、重掺杂P+和合适硅化铂膜厚提高量子效率的机理,并定量比较了提升幅度:多孔硅结构提升幅度最大,在波长4μm处的量子效率可达27%;相比内线转移CCD,电荷扫描器件、曲流沟道CCD和混合读出结构均能改善填充因子,其中混合读出结构的填充因子可提高为80%。微透镜列阵能将填充因子提高到85%以上。
Silica Platinum Infrared Focal Plane Detector has many potential applications such as wide / broad spectrum imaging, laser detection, astronomical observation and medical detection because of its wide response spectrum, large scale, good uniformity, high time stability and low manufacturing cost However, the sensitivity of the NETD 100 mK has some limitations on its wide range of applications. This paper summarizes and analyzes the improved technologies both at home and abroad from the quantum efficiency and the fill factor of the detector. The mechanism of improving the quantum efficiency of the optical cavity structure, the porous silicon structure, the heavily doped P + and the suitable platinum silicide film thickness is analyzed emphatically. And quantitatively compared the improvement: the maximum increase of the porous silicon structure and the quantum efficiency of 27% at the wavelength of 4 μm; the filling can be improved compared with the internal transfer CCD, the charge scanning device, the meandering channel CCD and the mixed readout structure Factor, which mixed readout structure filling factor can be increased to 80%. The microlens array can increase the fill factor above 85%.