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在半导体激光器的输出端面上蒸镀ＳｉＯ／ＳｉＯ２双层减反射涂层，我们制造了１．３μｍ超辐射发光二极管，对其输出特性进行了研究，并估算了涂层的剩余反射率，得到了剩余反射率小于１０－３的减反射涂层。
SiO 2 SiO 2 antireflection coating was deposited on the output side of the semiconductor laser. We fabricated a 1.3 μm superluminescent diode, studied its output characteristics and estimated the residual reflectivity of the coating. Antireflection coatings with a residual reflectance of less than 10-3.