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采用有氧热处理、激光预处理和离子后处理三种方式对电子束蒸发(EBE)制备的单层ZrO_2薄膜进行了后处理,并分别对样品的光学性能和抗激光损伤阈值(LIDT)特性进行了研究。实验结果表明,热处理方式可以有效排除膜层内吸附的水气,弥补薄膜制备过程中的氧损失,使得光谱短移、吸收减小、损伤阈值增高;激光预处理过程可以在一定程度上减少缺陷、提高损伤阈值,但对膜层的光谱和吸收情况没有明显的改善作用;而离子后处理能够提高膜层的堆积密度、减少缺陷、降低吸收从而提高损伤阈值。由于三种方式处理机制不同,在实际应用中应根据膜层的性能选择合适的处理方式。
The single-layer ZrO_2 films prepared by electron beam evaporation (EBE) were treated by aerobic heat treatment, laser pretreatment and ion post-treatment. The optical properties and laser damage resistance threshold (LIDT) Study. The experimental results show that the heat treatment can effectively eliminate the moisture adsorbed in the membrane and compensate for the oxygen loss in the membrane preparation process, resulting in a short spectrum shift and a decrease in absorption and an increase in the damage threshold. Laser pretreatment can reduce the defects to a certain extent , But the damage threshold is not improved, but the spectrum and absorption of the coating have no significant improvement. However, the ion post-treatment can increase the packing density of the coating, reduce the defects and reduce the absorption so as to improve the damage threshold. As the three ways to deal with different mechanisms in the practical application should be based on the performance of the film to choose the appropriate treatment.