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叙述了用扫描隧道显微镜（ＳＴＭ）和原子力显微镜（ＡＦＭ）观测研究荷电离子轰击靶材料损伤潜径达的状况和进展．观测研究了Ａｕ离子和Ｈ＋轰击高定向石墨（ＨＯＰＧ）的ＳＴＭ．给出了损伤形貌、损伤范围、表面损伤数密度和离子注入剂量的关系，并对损伤过程进行了分析和讨论．
The scanning electron microscope (STM) and atomic force microscope (AFM) were used to investigate the status and progress of damage potential of charged ion bombardment targets. Observed the Au ion and H + bombardment of highly oriented graphite (HOPG) STM. The relationship between the damage morphology, the extent of damage, the number density of surface damage and the dose of ion implantation is given. The damage process is also analyzed and discussed.